Direct defect level analysis for Metal-Insulator-Metal Capacitor using Internal Photoemission Spectroscopy
Journal
IEEE J. of EDS
Vol
9
Page
9404305
Author
T.J.Yoo, H.J.Hwang, S.C.Kang, S.W.Heo, H.I.Lee, Y.G.Lee, H.K.Park, S.K.Lee and B.H. Lee*
Year
2021
Date
2021
File
2021 JEDS TJYoo.pdf (1.6M) 1회 다운로드 DATE : 2022-06-01 16:21:40