Performance and reliability analysis of p-type metal-oxide-semiconductor field effect transistors with various combinations of Ru and Al gate metal
- Journal
- J. Vac. Sci. Technol.
- Vol
- 28(6)
- Page
- 1267
- Year
- 2010
- File
- 2010_JVSTB_HBPARK.pdf (104.9K) 0회 다운로드 DATE : 2021-04-02 13:56:19
- Link
- https://doi.org/10.1116/1.3514103 177회 연결