포항공대 EESL Fearless challenge

A study of the leakage current in TiN/HfO2/TiN capacitors

Journal

Microelectronic Engineering

Vol

95

Page

71-73

Author

S. Cimino, A. Padovani, L. Larcher, V.V. Afanas’ev, H.J. Hwang, Y.G. Lee, M. Jurczac, D. Wouters, B.H. Lee, H. Hwang, L. Pantisano

Year

2012

Date

2012.07

doi

http://doi.org/10.1016/j.mee.2011.03.009

File

2012-ME-Cimino.pdf (441.4K) 2회 다운로드 DATE : 2021-04-02 17:38:57

Link

http://doi.org/10.1016/j.mee.2011.03.009 166회 연결