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    • Quantitative defect density extraction method for metal–insulator–metal capacitor
    Journal
    Semicond. Sci. Technol.
    Vol
    35
    Page
    115025
    Author
    S.C.Kang, S.K.Lee, S.M.Kim, H.J.Hwang, and B.H. Lee
    Year
    2020
    Date
    2020.08.09
    doi
    https://doi.org/10.1088/1361-6641/abb8af
    File
    Kang_2020_Semicond._Sci._Technol._35_115025 1.pdf (1.1M) 6회 다운로드 DATE : 2021-03-31 17:40:44