Conferences 1 페이지 | 포항공대 EESL

CONTACT US

Research
PEOPLE
- Professor
- Member
- Visitor
- Alumni
Publication
BOARD
- Lab board
- News
- Gallery

Total 5건 1 페이지

1996
5

International
"Spectrophotometry and Beam Profile Reflectometry Measurement of Six layers in a SOI Film Stack" J.M. Leng, J.J. Sidorowich, Y.D. Yoon, J. Opsal, B. H. Lee, G. Cha, J. Moon, and S.I. Lee, Proceedings of SPIE symposium on Microelectronic Manufacturing, 1996.
4

International
"Advanced Integration Technology for a Highly Scalable SOI DRAM with SOC(Silicon-On-Capacitor)" I.K. Kim, S.I. Yu, W.T. Kang, K.H. Yeom, Y.K. Kim, J.H. Lee, K.C. Park, B. H. Lee, K.W. Lee, G.Cha, S.I. Lee, T.E.Shim and J.W . Park, Tech. Dig. of IEDM, 1996.

Download
3

International
"A Novel Pattern Transfer Process for Bonded SOI Giga-bit DRAMs" B.H. Lee, G.J. Bae, G. Cha, W.D. Kim, S.I. Lee, T. Barge, A.J. Auberton-Herve, and J.M. Lamure, Proceedings of 22nd IEEE International SOI Conference, 1996.

Download
2

International
"Vacuum Bonding for the Fabrication of PBSOI" G. Cha, B. H. Lee, K.W. Lee, G.J. Bae, J. Moon, and S.I. Lee, International Conference on Solid State Devices and Materials, 1996.
1

International
"Post CMP Cleaning for Dielectrically Isolated SOI wafers" G.J. Bae, B. H. Lee, G. Cha, S.I. Lee, ECS Symposium on Chemical Mechanical Planarization, 1996.

검색