A Novel CMP Method for Cost-effective Bonded SOI Wafer fabrication
Conference
Proceedings of 21st IEEE International SOI Conference
Author
B.H. Lee, C.J. Kang, J.H. Lee, S.I. Yu, K.W. Lee, K.C. Park and T.E. Shim
Year
1995
Date
1995
학회구분
International
File
1995_SOIConf._BHLEE.pdf (363.0K) 1회 다운로드 DATE : 2021-04-01 16:41:07