A Novel Pattern Transfer Process for Bonded SOI Giga-bit DRAMs
Conference
Proceedings of 22nd IEEE International SOI Conference
Author
B.H. Lee, G.J. Bae, G. Cha, W.D. Kim, S.I. Lee, T. Barge, A.J. Auberton-Herve, and J.M. Lamure
Year
1996
Date
1996
학회구분
International
File
1996_SOIConf._BHLEE.pdf (358.6K) 0회 다운로드 DATE : 2021-04-01 16:42:58