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    • Opportunities and challenges in ALD processing for advanced gate stack applications
    Conference
    Proc. of ALD conference
    Author
    R. Jammy, K.Choi, P. Kirsch, and B. H. Lee
    Year
    2006
    Date
    2006 (invited)
    학회구분
    International


    R. Jammy, K.Choi, P. Kirsch, and B. H. Lee, “Opportunities and challenges in ALD processing for advanced gate stack applications”, Proc. of ALD conference, (2006), Invited.