Thermally Stable N-Metal Gate MOSFETs Using La-Incorporated HfSiO Dielectric
Conference
Proc. of Symp. on VLSI Tech., p.16
Author
H.N. Alshareef , H.R. Harris, H.C. Wen, C.S. Park, C. Huffman, K. Choi, H.F. Luan, P. Majhi, B. H. Lee and R. Jammy, D.J. Lichtenwalner, J.S. Jur, and A. I. Kingon