Compatibility of ALD HfSiON with Dual Metal Gate CMOS Integration
- Conference
- Ext. Abs. of SSDM, p.1114
- Author
- M. M. Hussain, S. C. Song, C. Y. Kang, M. Quevedo-Lopez, H. N. Alshareef, B. Sassman, R. Choi, B. H. Lee
- Year
- 2006
- Date
- 2006
- 학회구분
-
International
M. M. Hussain, S. C. Song, C. Y. Kang, M. Quevedo-Lopez, H. N. Alshareef, B. Sassman, R. Choi, B. H. Lee, “Compatibility of ALD HfSiON with Dual Metal Gate CMOS Integration ”, Ext. Abs. of SSDM, p.1114, (2006).
