Systematic Gate Stack Optimization to Maximize Mobility with HfSiON EOT Scaling
- Conference
- Proc. of ESSDERC
- Author
- M. A. Quevedo-Lopez, P.D. Kirsch, S. Krishnan, J. Barnett, H. N. Alshareef , A. Neugroschel, F.S. Aguirre-Tostado, B. E. Gnade, M. J. Kim, R. M. Wallace and B. H. Lee
- Year
- 2006
- Date
- 2006
- 학회구분
-
International
M. A. Quevedo-Lopez, P.D. Kirsch, S. Krishnan, J. Barnett, H. N. Alshareef , A. Neugroschel, F.S. Aguirre-Tostado, B. E. Gnade, M. J. Kim, R. M. Wallace and B. H. Lee, “Systematic Gate Stack Optimization to Maximize Mobility with HfSiON EOT Scaling”, Proc. of ESSDERC, (2006).
