Thickness, Morphology and Mobility: A Study of Hf-based Dielectric Performance
Conference
ISAGST
Author
G.Pant, M.J.Kim,B.E.Gnade, R.M. Wallace, M.Queveo-Lopez, S. Krishnan, P.D.Kirsch, B. H. Lee and R. Jammy
Year
2006
Date
2006
학회구분
International