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    • Challenges in dual workfunction metal gate CMOS integration
    Conference
    ECS Fall meeting, ECS Trans. 3, (2), p.263
    Author
    B. H. Lee,, S.C. Song, M.Hussain, J.Barnett, R. Jammy
    Year
    2006
    Date
    2006 (invited)
    학회구분
    International
    File
    2006_ECS-TRANS_BHLEE.pdf (443.1K) 0회 다운로드 DATE : 2021-04-02 12:54:55

    B. H. Lee,, S.C. Song, M.Hussain, J.Barnett, R. Jammy, “Challenges in dual workfunction metal gate CMOS integration”, ECS Fall meeting, ECS Trans. 3, (2), p.263, (2006), Invited.