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    • A study of high-k removal by plasma etching and its effect on gate dielectric characterization
    Conference
    53rd AVS Symp.
    Author
    B.S.Ju, S.-C. Song, J. Barnett, B. H. Lee
    Year
    2006
    Date
    2006
    학회구분
    International

    B.S.Ju, S.-C. Song, J. Barnett, B. H. Lee, “A study of high-k removal by plasma etching and its effect on gate dielectric characterization”, 53rd AVS Symp., (2006).