Spectrophotometry and Beam Profile Reflectometry Measurement of Six layers in a SOI Film Stack
- Conference
- Proceedings of SPIE symposium on Microelectronic Manufacturing
- Author
- J.M. Leng, J.J. Sidorowich, Y.D. Yoon, J. Opsal, B. H. Lee, G. Cha, J. Moon, and S.I. Lee
- Year
- 1996
- Date
- 1996
- 학회구분
-
International
