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    • Simplified manufacturable band edge metal gate solution for NMOS without a capping layer
    Conference
    IEDM
    Author
    H. R.Harris, H. Alshareef, H.C. Wen, S. Krishnan, K. Choi, H. Luan, D. Heh, C.S. Park, H.B. Park, M. Hussain, B.S. Ju, P.D. Kirsch, S.C. Song, P. Majhi, B. H. Lee, R. Jammy
    Year
    2006
    Date
    2006
    학회구분
    International
    File
    2006_IEDM_HRHARRIS.pdf (1.1M) 0회 다운로드 DATE : 2021-04-02 13:01:30


    H. R.Harris, H. Alshareef, H.C. Wen, S. Krishnan, K. Choi, H. Luan, D. Heh, C.S. Park, H.B. Park, M. Hussain, B.S. Ju, P.D. Kirsch, S.C. Song, P. Majhi, B. H. Lee, R. Jammy, “Simplified manufacturable band edge metal gate solution for NMOS without a capping layer”, IEDM, (2006).