Mobility Enhancement in Strained Si NMOSFETs with HfO2 Gate Dielectrics
Conference
Tech. Dig. of VLSI Symposium
Author
K. Rim, E.P. Gusev, C. D’Emic, H. Chen, J. Chu, J. Ott, B. H. Lee, A. Mocuta, K. Chan, T. Kanarsky, D. Boyd, V. Mazzeo, M. Ieong, S.L. Cohen, H.-S. Wong
Year
2002
Date
2002
학회구분
International
File
2002_Tech.Dig.VLSI.Sym_K.Rim.pdf (268.1K) 0회 다운로드 DATE : 2021-04-02 14:29:58