포항공대 EESL Fearless challenge

Effect of surface preparation on high-k gate stack performance

Conference

Proceedings of ECS symposium

Author

N. Moumen, J. Barnett, R.W. Murto, M. Gardner, B. H. Lee e, J.J. Peterson, G. Bersuker and H. R. Huff

Year

2003

Date

2003

학회구분

International

File

2003_ECS.Sym_N.MouMen.pdf (94.0K) 0회 다운로드 DATE : 2021-04-02 14:31:52