Strained Si MOSFETs on SiGe-on-Insulator (SGOI) for High Performance CMOS Technology
Conference
Ext. Abs. of SSDM
Author
K. Rim, B. H. Lee, A. Mocuta, K. Jenkins, S. Bedell, H. Chen, D. Sadana, M. Gribelyuk, J. Ott, K. Chan, L. Shi, J. Chu, D. Boyd, P. Mooney, P. O’Neil, and J. Welser