High Performance CMOS Devices on SOI for 90 nm Technology Enhanced by RSD (Raised Source/Drain) and Thermal Cycle/Spacer Engineering
- Year
- 2003
- Date
- 2003
- 학회구분
- International
- File
- 2003_Tech.Dig.IEDM_H.Park.pdf (288.6K) 0회 다운로드 DATE : 2021-04-02 14:34:00