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Effect of Barrier layer on the Electrical and Reliability Characteristics of High-k gate dielectric films

Conference

Tech. Dig. of Int. Electron Device Meetings

Author

Y. Jeon, B. H. Lee, K. Zawadzki, W.Qi, A. Lucas, R. Nieh and J. Lee

Year

1998

Date

1998

학회구분

International

File

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