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    • ALD HfO2 thickness dependence on charge trapping characteristics in mobility enhancement
    Conference
    Proc. of INFOS
    Author
    J.H. Sim, S.C. Song, P.D. Kirsch, C.D. Young, R. Choi, G. Bersuker, D.L. Kwong, B. H. Lee
    Year
    2005
    Date
    2005
    학회구분
    International

    J. H. Sim, S.C. Song, P.D. Kirsch,C. D. Young, R. Choi, G. Bersuker, D. L. Kwong and B. H. Lee, “ALD HfO2 thickness dependence on charge trapping characteristics in mobility enhancement”, Proc. of INFOS, p.218, (2005).