Ultrathin hafnium oxide with low leakage and excellent reliability for alternative gate dielectric applications
Conference
Tech. Dig. of Int. Electron Device Meetings
Author
B. H. Lee, L. Kang, W. Qi, R. Nieh, K. Onishi, and J. C. Lee
Year
1999
Date
1999
학회구분
International
File
1999_IEDM_BHLEE.pdf (385.7K) 2회 다운로드 DATE : 2021-04-01 16:51:52