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    • Impact of Plasma Induced Damage on PMOSFETs with TiN/Hf-silicate Stack
    Conference
    Proc. of IRPS
    Author
    S.C. Song, S.H. Bae, Z. Zhang, J.H. Sim, B. Sassman, G. Bersuker, P. Zeitzoff, B.H. Lee
    Year
    2005
    Date
    2005
    학회구분
    International
    File
    2005_IRPS_SCSONG.pdf (845.5K) 0회 다운로드 DATE : 2021-04-03 21:03:20

    S.C.Song, S.H.Bae, Z.Zhang, J.H.Sim, B.Sassman, G.Bersuker, P.Zeitzoff, and B.H.Lee, “Impact of Plasma Induced Damage on PMOSFETs with TiN/Hf-silicate Stack”, Proc. of IRPS, p.398, (2005).