Dominant SILC mechanisms in HfO2/TiN gate NMOS and PMOS transistors
Conference
Proc. of IRPS
Author
S.A. Krishnan, J.J. Peterson, C. Young, G. Brown, R. Choi, R. Harris, J. Sim, B.H. Lee, P. Zeitzoff, P. Kirsch, J. Gutt, H.J. Li, K. Matthews, J.C. Lee, G. Bersuker
Year
2005
Date
2005
학회구분
International
File
2005_IRPS_SAKRISHNAN.pdf (479.0K) 0회 다운로드 DATE : 2021-04-03 21:18:01

S.A. Krishnan, J.J. Peterson, C. Young, G. Brown, R. Choi, R. Harris, J. Sim, B. H. Lee, P. Zeitzoff, P. Kirsch, J.Gutt, H.J. Li, K. Matthews, J.C. Lee, and G. Bersuker, “Dominant SILC mechanisms in HfO2/TiN gate NMOS and PMOS transistors”, Proc. of IRPS, p.642, (2005).