Implication of polarity dependence degradation on NMOSFET with polysilicon/Hf-silicate gate stack
Conference
Proc. of IRPS
Author
R. Choi, B.H. Lee, C.D. Young, J.H. Sim, K. Mathews, G. Bersuker, P. Zeitzoff
Year
2005
Date
2005
학회구분
International
File
2005_IRPS_RCHOI.pdf (467.3K) 0회 다운로드 DATE : 2021-04-03 21:23:06

R. Choi, B. H. Lee, C. D. Young, J. H. Sim, K. Mathews, G. Bersuker, P. Zeitzoff, “Implication of polarity dependence degradation on NMOSFET with polysilicon/Hf-silicate gate stack”, Proc. of IRPS, p.636, (2005).