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    • Interfacial Layer Dependence of HfSixOy Gate Stacks on Vt Instability and Charge Trapping Using Ultra-Short Pulse I-V Characterization
    Conference
    Proc. of IRPS
    Author
    C.D. Young, R. Choi, J.H. Sim, B.H. Lee, P. Zeitzoff, Y. Zhao, K. Matthews, G.A. Brown, G. Bersuker
    Year
    2005
    Date
    2005
    학회구분
    International
    File
    2005_IRPS_CDYOUNG.pdf (882.4K) 0회 다운로드 DATE : 2021-04-03 21:25:21

    C.D. Young, R. Choi, J.H. Sim, B. H. Lee, P. Zeitzoff, bY. Zhao, K. Matthews, G.A. Brown, and G. Bersuker, “Interfacial Layer Dependence of HfSixOy Gate Stacks on Vt Instability and Charge Trapping Using Ultra-Short Pulse I-V Characterization”, Proc. of IRPS, p.75, (2005).