A Systematic Study of the Influence of Nitrogen in Tuning the Effective Work Function of Nitrided Metal Gates
Conference
Proc. of VLSI-TSA
Author
P. Majhi, H.C. Wen, K. Choi, H. Alsharee, C. Huffman, B.H. Lee
Year
2005
Date
2005
학회구분
International
File
2005_VLSITSA_PMAJHI.pdf (390.3K) 0회 다운로드 DATE : 2021-04-03 21:27:01

P. Majhi, H.C. Wen, K. Choi, H. Alsharee, C. Huffman, and B. H. Lee, “A Systematic Study of the Influence of Nitrogen in Tuning the Effective Work Function of Nitrided Metal Gates ”, Proc. of VLSI-TSA, p.105, (2005).