A Systematic Study of the Influence of Nitrogen in Tuning the Effective Work Function of Nitrided Metal Gates
- Year
- 2005
- Date
- 2005
- 학회구분
- International
- File
- 2005_VLSITSA_PMAJHI.pdf (390.3K) 0회 다운로드 DATE : 2021-04-03 21:27:01
P. Majhi, H.C. Wen, K. Choi, H. Alsharee, C. Huffman, and B. H. Lee, “A Systematic Study of the Influence of Nitrogen in Tuning the Effective Work Function of Nitrided Metal Gates ”, Proc. of VLSI-TSA, p.105, (2005).