MOSCAP and MOSFET characteristics using ZrO2 gate dielectric deposited directly on Si
Conference
Tech. Dig. of Int. Electron Device Meetings
Author
W. Qi, R. Nieh, B. H. Lee, L. Kang, Y. Jeon, K. Onishi, T. Nagai, S. Banerjee, and J. C. Lee
Year
1999
Date
1999
학회구분
International
File
1999_IEDM_W_Qi.pdf (503.4K) 0회 다운로드 DATE : 2021-04-01 16:52:31