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    • Growth Mechanism of ALD-TiN and the Thickness Dependence of Work Function
    Conference
    Proc. of VLSI-TSA
    Author
    K. Choi, P.Lysaght, Alshareef, H.C. Wen, R. Harris, H. Luan, K. Matthews, P. Majhi, B.H. Lee
    Year
    2005
    Date
    2005
    학회구분
    International
    File
    2005_VLSITSA_KCHOI.pdf (395.2K) 0회 다운로드 DATE : 2021-04-03 21:28:07

    K. Choi, P.Lysaght, Alshareef, H. C. Wen, R. Harris, H. Luan, K.Matthews, P. Majhi, and B. H. Lee, “Growth Mechanism of ALD-TiN and the Thickness Dependence of Work Function”, Proc. of VLSI-TSA, p.103, (2005).