Evaluation and Integration of Metal Gate Electrodes for Future Generation Dual Metal CMOS
Conference
Proc. of ICICDT
Author
P. Majhi, H.C. Wen, H. Alshareef, K. Choi, R. Harris, P. Lysaght, H. Luan, Y. Senzaki, S.C. Song, B.H. Lee, C. Ramiller
Year
2005
Date
2005, invited
학회구분
International
File
2005_ICICDT_PMAJHI.pdf (649.4K) 0회 다운로드 DATE : 2021-04-03 21:32:31

P. Majhi, H.C. Wen, H. Alshareef, K. Choi, R. Harris, P. Lysaght, H. Luan, Y. Senzaki, S. C. Song, B. H. Lee, and C. Ramiller, “Evaluation and Integration of Metal Gate Electrodes for Future Generation Dual Metal CMOS”, Proc. of ICICDT, p.69, (2005), Invited.