Recent Development of CMOSFET with Hf-based High-k Dielectric
Conference
ECS spring meeting
Author
S.C. Song, G. Bersuker, B.H. Lee, Z. Zhang, P. Kirsch, P. Majhi, C.Ramiller
Year
2005
Date
2005, invited
학회구분
International

S.C.Song, G.Bersuker, B. H. Lee, Z.Zhang, P.Kirsch, P.Majhi, and C.Ramiller, “Recent Development of CMOSFET with Hf-based High-k Dielectric”, ECS spring meeting, (2005), Invited.