Charge Trapping in n-MOSFETs with TiN/HfSixOy/SiO2/p-Si Gate Stack during Substrate Injection
Conference
ECS spring
Author
P. Srinivasan , N.A. Chowdhury, A. Peralta, D. Misra, R. Choi, B.H. Lee
Year
2005
Date
2005
학회구분
International

P. Srinivasan , N. A. Chowdhury, A. Peralta, D. Misra, R.Choi and B. H. Lee, “Charge Trapping in n-MOSFETs with TiN/HfSixOy/SiO2/p-Si Gate Stack during Substrate Injection”, ECS spring, (2005).