Interfacial layer properties in high-k gate dielectric transistors
Conference
ECS spring meeting
Author
G. Bersuker, J. Peterson, J. Barnet, J. Sim, R. Choi, B.H. Lee, P. Lysaght, H.R. Huff
Year
2005
Date
2005
학회구분
International

G. Bersuker, J. Peterson, J. Barnet, J. Sim, R. Choi, B. H. Lee, P. Lysaght, H. R. Huff, “Interfacial layer properties in high-k gate dielectric transistors”, ECS spring meeting, (2005).