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    • Comparison of MOSFET characteristics between ALD and MOCVD TiN metal gate on Hf silicate
    Conference
    ECS spring meeting
    Author
    S.C. Song, B.H. Lee, Z. Zhang, K. Choi, S.H. Bae, H. Alshareef, P. Majhi, H.C. Wen, J. Bennett, B. Sassman, P. Zeitzoff
    Year
    2005
    Date
    2005
    학회구분
    International

    S.C.Song, B. H. Lee, Z.Zhang, K.Choi, S.H Bae, H.Alshareef, P.Majhi, H.C.Wen, J.Bennett , B.Sassman, and P. Zeitzoff, “Comparison of MOSFET characteristics between ALD and MOCVD TiN metal gate on Hf silicate”, ECS spring meeting, (2005).