A preliminary understanding of processing-nanostructure-property inter-relationships in High-k/Metal gate stacks
Conference
NATO Workshop on defect in high-k dielectrics, St. Petersburg
Author
P. Majhi, B.H. Lee
Year
2005
Date
2005, invited
학회구분
International

P.Majhi, and B. H. Lee, “A preliminary understanding of processing-nanostructure-property inter-relationships in High-k/Metal gate stacks”, NATO Workshop on defect in high-k dielectrics, St. Petersburg, (2005), Invited.