Electrical Characterization Methodologies for Advanced Gate Stacks with Metal gate and High-k dielectrics
Conference
International Semiconductor Technology Conference
Author
B.H. Lee, G. Bersuker, N. Moumen, P. Majhi, P. Kirsch, S.C. Song, C. Ramiller
Year
2005
Date
2005, invited
학회구분
International

B. H. Lee,, G. Bersuker, N. Moumen, P. Majhi, P. Kirsch, S.C. Song and C. Ramiller, “Electrical Characterization Methodologies for Advanced Gate Stacks with Metal gate and High-k dielectrics”, International Semiconductor Technology Conference, (2005), Invited.