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    • High-k Dielectric Process Development for Enhanced Electron Mobility in High Performance Field Effect Transistors
    Conference
    ISTC
    Author
    P.D. Kirsch, J.J. Peterson, H.-J. Li, J. Gutt, S. Krishnan, M. Quevedo-Lopez, B.H. Lee, N. Moumen, J. Barnett, P. Majhi, S.C. Song, C. Ramiller
    Year
    2005
    Date
    2005
    학회구분
    International
    File
    2005_ISTC_PDKIRSCH.pdf (1.1M) 0회 다운로드 DATE : 2021-04-03 21:43:09

    P. D. Kirsch, J.J. Peterson, H.-J. Li, J. Gutt, S. Krishnan, M. Quevedo-Lopez, B. H. Lee, N. Moumen, J. Barnett, P. Majhi, S.C. Song and C. Ramiller, “High-k Dielectric Process Development for Enhanced Electron Mobility in High Performance Field Effect Transistors”, ISTC, (2005), Invited.