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    • Impact of thickness of metal nitride (TiN) in Poly Si/TiN gate stack on electrical performance and reliability
    Conference
    Proceedings of EMC
    Author
    S.H. Bae, S.C. Song, B.H. Lee
    Year
    2005
    Date
    2005
    학회구분
    International

    S.H Bae, S.C. Song, B. H. Lee, “Impact of thickness of metal nitride (TiN) in Poly Si/TiN gate stack on electrical performance and reliability ”, Proceedings of EMC, (2005).