Impact of thickness of metal nitride (TiN) in Poly Si/TiN gate stack on electrical performance and reliability
- Year
- 2005
- Date
- 2005
- 학회구분
- International
S.H Bae, S.C. Song, B. H. Lee, “Impact of thickness of metal nitride (TiN) in Poly Si/TiN gate stack on electrical performance and reliability ”, Proceedings of EMC, (2005).