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    • Physical Characterization of Novel Metal Electrodes for Hf-based Transistors
    Conference
    AIP Conf. Proc. 788, characterization and metrology for ULSI technology
    Author
    P.S. Lysaght, H.-C. Wen, H. Alshareef, K. Choi, R. Harris, H. Luan, G. Lian, M. Campin, M. Clark, B. Foran, P. Majhi, B.H. Lee
    Year
    2005
    Date
    2005
    학회구분
    International
    File
    2005_AIP_PSLYSAGHT.pdf (1.7M) 0회 다운로드 DATE : 2021-04-03 21:49:38

    P. S. Lysaght, H.-C. Wen, H. Alshareef, K. Choi, R. Harris, H. Luan, G. Lian, M. Campin, M. Clark, B. Foran, P. Majhi and B. H. Lee, “Physical Characterization of Novel Metal Electrodes for Hf-based Transistors”, AIP Conf. Proc. 788, characterization and metrology for ULSI technology, p.136, (2005).