Hafnium and Zirconium based High-k dielectrics
Conference
MRS workshop on High-k gate dielectrics, New Orleans
Author
J.C. Lee, B. H. Lee, K. Onishi, L. Kang, Y. Jeon, R. Nieh, W. Qi, and R. Choi
Year
2000
Date
2000, invited
학회구분
International