포항공대 EESL Fearless challenge

Hafnium and Zirconium based High-k dielectrics

Conference

MRS workshop on High-k gate dielectrics, New Orleans

Author

J.C. Lee, B. H. Lee, K. Onishi, L. Kang, Y. Jeon, R. Nieh, W. Qi, and R. Choi

Year

2000

Date

2000, invited

학회구분

International