Processing effect and electrical characteristics of ZrO2 formed by RTP oxidation of Zr
Conference
ECS spring meeting, Ontario
Author
R. Nieh, W. Qi, B. H. Lee, L. Kang, Y. Jeon, K. Onishi, and J. C. Lee
Year
2000
Date
2000
학회구분
International
File
2000_ECS_R.Nieh.pdf (36.8K) 0회 다운로드 DATE : 2021-04-01 16:57:50