Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high k dielectric film HfO2
Conference
Proc. SPIE - Int. Soc. Opt. Eng. (USA)
Author
J. Leng, S. Li, J.L Opsal, D.E. Aspnes, B. H. Lee, J.C. Lee
Year
2000
Date
2000
학회구분
International