목록 게시판 리스트 옵션 검색 Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high k dielectric film HfO2 Conference Proc. SPIE - Int. Soc. Opt. Eng. (USA) Author J. Leng, S. Li, J.L Opsal, D.E. Aspnes, B. H. Lee, J.C. Lee Year 2000 Date 2000 학회구분 International