Performance of MOSFETs with ultrathin ZrO2 and Zr silicate gate dieletrics
Conference
Proc. of Symposium on VLSI technology
Author
W. Qi, R. Nieh, B. H. Lee, K. Onishi, L. Kang, Y. Jeon, V. Kaushik, B.-Y. Neuyen, L. Prabhu, K. Eisenbeiser, J. Finder, and J. C. Lee
Year
2000
Date
2000
학회구분
International
File
2000_Sym.VLSI.Tech_W.Qi.pdf (233.0K) 0회 다운로드 DATE : 2021-04-01 16:59:17