Work function tuning by thickness variation of metal film and dielectric surface treatment
Conference
Proc. of ESSDERC
Author
K. Choi, H. Alshareef, P. Lysaght, H.-C. Wen, R. Harris, H. Luan, P. Majhi, B.H. Lee
Year
2005
Date
2005
학회구분
International

K. Choi, H. Alshareef, P. Lysaght, H.-C. Wen, R. Harris, H. Luan, P. Majhi, and B. H. Lee, “Work function tuning by thickness variation of metal film and dielectric surface treatment”, Proc. of ESSDERC, (2005).