Stress voltage polarity dependent threshold voltage shift behavior of ultrathin Hafnium oxide gated pMOSFET with TiN electrode
Conference
Ext. Abs. of Symp. on Solid State Device and Materials
Author
H.K. Park, R. Choi, B.H. Lee, C.D. Young, M. Chang, J.C. Lee, H. Hwang
Year
2005
Date
2005
학회구분
International

H.K. Park, R. Choi, B. H. Lee, C.D. Young, M. Chang, J.C. Lee and H. Hwang, “Stress voltage polarity dependent threshold voltage shift behavior of ultrathin Hafnium oxide gated pMOSFET with TiN electrode”, Ext. Abs. of Symp. on Solid State Device and Materials, (2005).