Stress voltage polarity dependent threshold voltage shift behavior of ultrathin Hafnium oxide gated pMOSFET with TiN electrode
- Year
- 2005
- Date
- 2005
- 학회구분
- International
H.K. Park, R. Choi, B. H. Lee, C.D. Young, M. Chang, J.C. Lee and H. Hwang, “Stress voltage polarity dependent threshold voltage shift behavior of ultrathin Hafnium oxide gated pMOSFET with TiN electrode”, Ext. Abs. of Symp. on Solid State Device and Materials, (2005).