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    • Impacts of Si Concentration in Hf-silicate on Performance and Reliability of Metal Gate CMOSFET
    Conference
    Ext. Abs. of Symp. on Solid State Device and Materials
    Author
    S.C. Song, S.H. Bae, J.H. Sim, G. Bersuker, Z. Zhang, P. Kirsch, P. Majhi, N. Moumen, P. Zeitzoff, B.H. Lee
    Year
    2005
    Date
    2005
    학회구분
    International

    S.C.Song, S.H.Bae, J.H.Sim, G.Bersuker, Z.Zhang, P.Kirsch, P.Majhi, N.Moumen, P. Zeitzoff, and B. H. Lee, “Impacts of Si Concentration in Hf-silicate on Performance and Reliability of Metal Gate CMOSFET”, Ext. Abs. of Symp. on Solid State Device and Materials, (2005).