Demonstration of High Performance Transistors with PVD Metal Gate
Conference
Proc. of ESSDERC
Author
H.R. Harris, H.C. Wen, K. Choi, H. Alshareef, H. Luan, Y. Senzaki, C.D. Young, S.C. Song, Z. Zhang, G. Bersuker, P. Majhi, B.H. Lee
Year
2005
Date
2005, invited
학회구분
International
File
2005_ESSDERC_HRHARRIS.pdf (259.0K) 0회 다운로드 DATE : 2021-04-04 16:09:26

H.R. Harris, H.C. Wen, K. Choi, H. Alshareef, H. Luan, Y. Senzaki, C.D. Young, S.C. Song, Z. Zhang, G. Bersuker, P. Majhi and B. H. Lee, “Demonstration of High Performance Transistors with PVD Metal Gate”, Proc. of ESSDERC, (2005).