Demonstration of High Performance Transistors with PVD Metal Gate
- Year
- 2005
- Date
- 2005, invited
- 학회구분
- International
- File
- 2005_ESSDERC_HRHARRIS.pdf (259.0K) 0회 다운로드 DATE : 2021-04-04 16:09:26
H.R. Harris, H.C. Wen, K. Choi, H. Alshareef, H. Luan, Y. Senzaki, C.D. Young, S.C. Song, Z. Zhang, G. Bersuker, P. Majhi and B. H. Lee, “Demonstration of High Performance Transistors with PVD Metal Gate”, Proc. of ESSDERC, (2005).