포항공대 EESL EESL Fearless challenge

전체메뉴

전체메뉴
CONTACT US
  • LOGIN
    • Ultra-thin ALD-HfSiON/TiN Gate Stacks
    Conference
    Proc. of Int. Integrated Rel. Workshop
    Author
    S.A. Krishnan, M.A. Quevedo-Lopez, R. Choi, P. Kirsch, C. Young, R. Harris, J. Peterson, H.J. Li, B.H. Lee, J.C. Lee
    Year
    2005
    Date
    2005
    학회구분
    International

    S.A. Krishnan, M.A. Quevedo-Lopez1, R. Choi, P. Kirsch, C. Young, R. Harris, J. Peterson, H.J. Li, B. H. Lee and J.C. Lee, “ultra-thin ALD-HfSiON/TiN Gate Stacks”, Proc. of Int. Integrated Rel. Workshop, p.89, (2005).