Detection of Trap Generation in High-k Gate Stacks due to Constant Voltage Stress
- Year
- 2005
- Date
- 2005
- 학회구분
- International
C.D. Young, D. Heh, S. Nadkarni, R. Choi, J.J. Peterson, H.R. Harris, J.H. Sim, S.A. Krishnan, J. Barnett, E. Vogel, B. H. Lee, P. Zeitzoff, G.A. Brown, and G. Bersuker, “Detection of Trap Generation in High-k Gate Stacks due to Constant Voltage Stress”, Proc. of Int. Integrated Rel. Workshop, p.78, (2005).